Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices
In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices
In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices
Patsalas, P. (Autor:in) / Charitidis, C. (Autor:in) / Logothetidis, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 154-155 ; 256-262
01.01.2000
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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