A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices
In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices
In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices
Patsalas, P. (author) / Charitidis, C. (author) / Logothetidis, S. (author)
APPLIED SURFACE SCIENCE ; 154-155 ; 256-262
2000-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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