In situ spectral ellipsometry for real-time measurement and control

Duncan, W. M. / Henck, S. A. | British Library Online Contents | 1993

In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices

Patsalas, P. / Charitidis, C. / Logothetidis, S. | British Library Online Contents | 2000

In situ ellipsometry for real-time feedback control of oxidation furnaces

Schneider, C. / Berger, R. / Pfitzner, L. et al. | British Library Online Contents | 1993

Real time ellipsometry for monitoring plasma-assisted epitaxial growth of GaN

Bruno, G. / Losurdo, M. / Giangregorio, M. M. et al. | British Library Online Contents | 2006

Non-destructive characterisation of doped Si and SiGe epilayers using FTIR spectroscopic ellipsometry (FTIR-SE)

Pickering, C. / Leong, W. Y. / Glasper, J. L. et al. | British Library Online Contents | 2002