Atomic layer epitaxy of copper: an ab initio investigation of the CuCl/H~2 process I. Adsorption of CuCl on Cu(111)

Maartensson, P. / Larsson, K. / Carlsson, J.-O. | British Library Online Contents | 1998

Atomic layer epitaxy of copper: an ab initio investigation of the CuCl/H"2 process - II. Reaction energies

Martensson, P. / Larsson, K. / Carlsson, J.-O. | British Library Online Contents | 1999

Atomic layer epitaxy of germanium

Sugahara, S. / Kitamura, T. / Imai, S. et al. | British Library Online Contents | 1994

Modeling of silicon atomic-layer-epitaxy

Sugahara, S. / Hasunuma, E. / Imai, S. et al. | British Library Online Contents | 1996

Silane gas-source atomic layer epitaxy

Hirose, F. / Suemitsu, M. / Miyamoto, N. | British Library Online Contents | 1992