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Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
Choi, W. K. (Autor:in) / Bera, L. K. (Autor:in) / Chen, J. H. (Autor:in) / Feng, W. (Autor:in) / Pey, K. L. (Autor:in) / Yoong, H. (Autor:in) / Mi, J. (Autor:in) / Zhang, F. (Autor:in) / Yang, C. Y. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 75 ; 184 - 186
01.01.2000
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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