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Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
Choi, W. K. (author) / Bera, L. K. (author) / Chen, J. H. (author) / Feng, W. (author) / Pey, K. L. (author) / Yoong, H. (author) / Mi, J. (author) / Zhang, F. (author) / Yang, C. Y. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 75 ; 184 - 186
2000-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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