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Adsorption and decomposition of methylsilanes on Si(100)
Adsorption and decomposition of methylsilanes on Si(100)
Adsorption and decomposition of methylsilanes on Si(100)
Shinohara, M. (Autor:in) / Maehama, T. (Autor:in) / Niwano, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 162/163 ; 161-167
01.01.2000
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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