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Adsorption and decomposition of methylsilanes on Si(100)
Adsorption and decomposition of methylsilanes on Si(100)
Adsorption and decomposition of methylsilanes on Si(100)
Shinohara, M. (author) / Maehama, T. (author) / Niwano, M. (author)
APPLIED SURFACE SCIENCE ; 162/163 ; 161-167
2000-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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