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Device Innovation and Material Challenges at the Limits of CMOS Technology
Device Innovation and Material Challenges at the Limits of CMOS Technology
Device Innovation and Material Challenges at the Limits of CMOS Technology
Solomon, P. M. (Autor:in)
ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 681-697
01.01.2000
17 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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