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Device Innovation and Material Challenges at the Limits of CMOS Technology
Device Innovation and Material Challenges at the Limits of CMOS Technology
Device Innovation and Material Challenges at the Limits of CMOS Technology
Solomon, P. M. (author)
ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 681-697
2000-01-01
17 pages
Article (Journal)
English
DDC:
620.11
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