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Investigation of MEMS Microengines Rotating at 360,000 rpm
Investigation of MEMS Microengines Rotating at 360,000 rpm
Investigation of MEMS Microengines Rotating at 360,000 rpm
Brown, G. (Autor:in) / Pryputniewicz, R. (Autor:in)
ADVANCING MICROELECTRONICS ; 27 ; 19-22
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.381
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