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Investigation of MEMS Microengines Rotating at 360,000 rpm
Investigation of MEMS Microengines Rotating at 360,000 rpm
Investigation of MEMS Microengines Rotating at 360,000 rpm
Brown, G. (author) / Pryputniewicz, R. (author)
ADVANCING MICROELECTRONICS ; 27 ; 19-22
2000-01-01
4 pages
Article (Journal)
English
DDC:
621.381
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