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Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies
Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies
Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies
Rasheed, B. G. (Autor:in) / Mavi, H. S. (Autor:in) / Shukla, A. K. (Autor:in) / Abbi, S. C. (Autor:in) / Jain, K. P. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 79 ; 71 - 77
01.01.2001
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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