Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies: Fid-Bau Portal

Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies

Rasheed, B. G. / Mavi, H. S. / Shukla, A. K. / Abbi, S. C. / Jain, K. P.

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Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies

Rasheed, B. G. / Mavi, H. S. / Shukla, A. K. / Abbi, S. C. / Jain, K. P.

Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies

Rasheed, B. G. / Mavi, H. S. / Shukla, A. K. / Abbi, S. C. / Jain, K. P.

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Document information

Title:

Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies

Contributors:

Rasheed, B. G. (author) / Mavi, H. S. (author) / Shukla, A. K. (author) / Abbi, S. C. (author) / Jain, K. P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 79 ; 71 - 77

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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