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Formation of Al-doped ZnO films by dc magnetron reactive sputtering
Formation of Al-doped ZnO films by dc magnetron reactive sputtering
Formation of Al-doped ZnO films by dc magnetron reactive sputtering
Chen, M. (Autor:in) / Pei, Z. L. (Autor:in) / Sun, C. (Autor:in) / Wen, L. S. (Autor:in) / Wang, X. (Autor:in)
MATERIALS LETTERS ; 48 ; 194-198
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
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