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Formation of Al-doped ZnO films by dc magnetron reactive sputtering

Chen, M. / Pei, Z. L. / Sun, C. / Wen, L. S. / Wang, X.

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Formation of Al-doped ZnO films by dc magnetron reactive sputtering

Chen, M. / Pei, Z. L. / Sun, C. / Wen, L. S. / Wang, X.

Formation of Al-doped ZnO films by dc magnetron reactive sputtering

Chen, M. / Pei, Z. L. / Sun, C. / Wen, L. S. / Wang, X.

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Check availability in my library

Order at Subito €

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Document information

Title:

Formation of Al-doped ZnO films by dc magnetron reactive sputtering

Contributors:

Chen, M. (author) / Pei, Z. L. (author) / Sun, C. (author) / Wen, L. S. (author) / Wang, X. (author)

Published in:

MATERIALS LETTERS ; 48 ; 194-198

Publication date:

2001-01-01

Size:

5 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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