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Optical properties of boron nitride thin films deposited by microwave PECVD
Optical properties of boron nitride thin films deposited by microwave PECVD
Optical properties of boron nitride thin films deposited by microwave PECVD
Soltani, A. (Autor:in) / Thevenin, P. (Autor:in) / Bath, A. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 82 ; 170 - 172
01.01.2001
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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