Two-stage compliant microleverage mechanism optimization in a resonant accelerometer

Su, X.-P. S. / Yang, H. S. | British Library Online Contents | 2001

Development and Performance Test of a Micromachined Resonant Accelerometer

Sung, S. / Kang, T. / Hyun, C. et al. | British Library Online Contents | 2004

Modeling of Nonlinear Stiffness of Micro-Resonator in Silicon Resonant Accelerometer

Jing, Z. / Jiang, S.D. / Qiu, A.P. | British Library Online Contents | 2013

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Shang, Y.L. / Wang, J.B. / Chen, D.Y. et al. | British Library Online Contents | 2012

A Novel Noise Resistance Optical Accelerometer Based on Micro-Ring Resonant Cavity

Wang, X.Q. / Yan, S.B. / Ma, K.Z. et al. | British Library Online Contents | 2013