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Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition
Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition
Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition
Tharigen, T. (Autor:in) / Lorenz, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 179 ; 157-161
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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