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Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition
Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition
Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition
Tharigen, T. (author) / Lorenz, M. (author)
APPLIED SURFACE SCIENCE ; 179 ; 157-161
2001-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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