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Microstructure evolution of nanometer-sized hemispherical-grained Si deposited by RTCVD
Microstructure evolution of nanometer-sized hemispherical-grained Si deposited by RTCVD
Microstructure evolution of nanometer-sized hemispherical-grained Si deposited by RTCVD
Berger, S. (Autor:in)
01.01.2001
3 pages
Aufsatz (Zeitschrift)
Englisch
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