Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation
Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation
Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation
Peterson, C. A. (Autor:in) / Vermeire, B. (Autor:in) / Sarid, D. (Autor:in) / Parks, H. G. (Autor:in)
APPLIED SURFACE SCIENCE ; 181 ; 28-34
01.01.2001
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Surface Roughening of Heteroepitaxial Thin Films
| British Library Online Contents | 1999
Surface roughening of silicon under ultra-low-energy cesium bombardment
| British Library Online Contents | 2003
Ultra thin gate oxide reliability enhanced by carbon contamination free process
| British Library Online Contents | 1997
Kinetic Surface Roughening of Platinum and Gold Thin Films
| British Library Online Contents | 2005
Copper Electroplating Technology for Roughening of Copper Foil
| British Library Online Contents | 2010