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Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation

Peterson, C. A. / Vermeire, B. / Sarid, D. / Parks, H. G.

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Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation

Peterson, C. A. / Vermeire, B. / Sarid, D. / Parks, H. G.

Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation

Peterson, C. A. / Vermeire, B. / Sarid, D. / Parks, H. G.

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Check availability in my library

Order at Subito €

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Document information

Title:

Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation

Contributors:

Peterson, C. A. (author) / Vermeire, B. (author) / Sarid, D. (author) / Parks, H. G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 181 ; 28-34

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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