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EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe
EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe
EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe
Notargiacomo, A. (Autor:in) / Giovine, E. (Autor:in) / Evangelisti, F. (Autor:in) / Foglietti, V. (Autor:in) / Leoni, R. (Autor:in)
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
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