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EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe

Notargiacomo, A. / Giovine, E. / Evangelisti, F. / Foglietti, V. / Leoni, R.

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EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe

Notargiacomo, A. / Giovine, E. / Evangelisti, F. / Foglietti, V. / Leoni, R.

EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe

Notargiacomo, A. / Giovine, E. / Evangelisti, F. / Foglietti, V. / Leoni, R.

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Title:

EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe

Contributors:

Notargiacomo, A. (author) / Giovine, E. (author) / Evangelisti, F. (author) / Foglietti, V. (author) / Leoni, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 19 ; 185-188

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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