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Fabrication of epitaxial SiGe optical waveguide structures
Fabrication of epitaxial SiGe optical waveguide structures
Fabrication of epitaxial SiGe optical waveguide structures
Kim, Y. (Autor:in) / Berlin, D. (Autor:in) / Samoilov, A. (Autor:in)
APPLIED SURFACE SCIENCE ; 224 ; 175-178
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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