Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Scanning probe microscopy generated out-of-plane deformation maps exhibiting heterogeneous nanoscale deformation resulting from thermal cycling of Cu-polyimide damascene interconnects
Scanning probe microscopy generated out-of-plane deformation maps exhibiting heterogeneous nanoscale deformation resulting from thermal cycling of Cu-polyimide damascene interconnects
Scanning probe microscopy generated out-of-plane deformation maps exhibiting heterogeneous nanoscale deformation resulting from thermal cycling of Cu-polyimide damascene interconnects
Gross, T. S. (Autor:in) / Kamsah, N. b. (Autor:in) / Tsukrov, I. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 3560-3566
01.01.2001
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Nanoscale patterning and deformation of soft matter by scanning probe microscopy
| British Library Online Contents | 2007
Texture Investigations In Damascene Copper Interconnects
| British Library Online Contents | 2002
Self-Annealing Textures of Copper Damascene Interconnects
| British Library Online Contents | 2004
Texture Investigation in Cu Damascene Interconnects during Annealing
| British Library Online Contents | 2005
Transmission electron microscopy observation of nanoscale deformation structures in nacre
| British Library Online Contents | 2008