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Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure
Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure
Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure
Rebohle, L. (Autor:in) / Gebel, T. (Autor:in) / Frob, H. (Autor:in) / Reuther, H. (Autor:in) / Skorupa, W. (Autor:in)
APPLIED SURFACE SCIENCE ; 184 ; 156-160
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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