Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure: Fid-Bau Portal

Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure

Rebohle, L. / Gebel, T. / Frob, H. / Reuther, H. / Skorupa, W.

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Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure

Rebohle, L. / Gebel, T. / Frob, H. / Reuther, H. / Skorupa, W.

Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure

Rebohle, L. / Gebel, T. / Frob, H. / Reuther, H. / Skorupa, W.

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Check availability in my library

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Document information

Title:

Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure

Contributors:

Rebohle, L. (author) / Gebel, T. (author) / Frob, H. (author) / Reuther, H. (author) / Skorupa, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 184 ; 156-160

Publication date:

2001-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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