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Non-Rutherford backscattering studies of SiC/SIMOX structures
Non-Rutherford backscattering studies of SiC/SIMOX structures
Non-Rutherford backscattering studies of SiC/SIMOX structures
Chen, K. W. (Autor:in) / Yu, Y. H. (Autor:in) / Lei, Y. M. (Autor:in) / Cheng, L. L. (Autor:in) / Sundaraval, B. (Autor:in) / Luo, E. Z. (Autor:in) / Wong, S. P. (Autor:in) / Wilson, I. H. (Autor:in) / Chen, L. Z. (Autor:in) / Ren, C. X. (Autor:in)
APPLIED SURFACE SCIENCE ; 184 ; 178-182
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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