Strong dependence of IR absorption in a-SiC:H dc magnetron sputtered thin films on H2 partial pressure

Stamate, M. D. | British Library Online Contents | 2001

Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD

Lopez, E. / Chiussi, S. / Kosch, U. et al. | British Library Online Contents | 2005

Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Rusakov, G. V. / Ivashchenko, L. A. / Ivashchenko, V. I. et al. | British Library Online Contents | 2001

Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Vasin, A. V. / Rusavsky, A. V. / Nazarov, A. N. et al. | British Library Online Contents | 2012

The use of liquid precursors in plasmachemical technology of obtaining a-SiC:H thin films

Ivashchenko, L. A. / Rusakov, G. V. / Ivashchenko, V. I. | British Library Online Contents | 1999