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Focused ion beam sputtering investigations on SiC
Focused ion beam sputtering investigations on SiC
Focused ion beam sputtering investigations on SiC
Bischoff, L. (Autor:in) / Teichert, J. (Autor:in) / Heera, V. (Autor:in)
APPLIED SURFACE SCIENCE ; 184 ; 372-376
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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