Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Use of ErSi2 in source/drain contacts of ultra-thin SOI MOSFETs
Use of ErSi2 in source/drain contacts of ultra-thin SOI MOSFETs
Use of ErSi2 in source/drain contacts of ultra-thin SOI MOSFETs
Huda, M. Q. (Autor:in) / Sakamoto, K. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 378 - 381
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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