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Use of ErSi2 in source/drain contacts of ultra-thin SOI MOSFETs

Huda, M. Q. / Sakamoto, K.

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Use of ErSi2 in source/drain contacts of ultra-thin SOI MOSFETs

Huda, M. Q. / Sakamoto, K.

Use of ErSi2 in source/drain contacts of ultra-thin SOI MOSFETs

Huda, M. Q. / Sakamoto, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Use of ErSi2 in source/drain contacts of ultra-thin SOI MOSFETs

Contributors:

Huda, M. Q. (author) / Sakamoto, K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 378 - 381

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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