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Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
Zhang, J. (Autor:in) / Woods, N. J. (Autor:in) / Breton, G. (Autor:in) / Price, R. W. (Autor:in) / Hartell, A. D. (Autor:in) / Lau, G. S. (Autor:in) / Liu, R. (Autor:in) / Wee, A. T. (Autor:in) / Tok, E. S. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 399 - 405
01.01.2002
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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