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Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
Zhang, J. (author) / Woods, N. J. (author) / Breton, G. (author) / Price, R. W. (author) / Hartell, A. D. (author) / Lau, G. S. (author) / Liu, R. (author) / Wee, A. T. (author) / Tok, E. S. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 399 - 405
2002-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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