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Measurement of the infrared absorbance of nitrogen in CZ silicon
Measurement of the infrared absorbance of nitrogen in CZ silicon
Measurement of the infrared absorbance of nitrogen in CZ silicon
Matsumoto, T. (Autor:in) / Yamanaka, Y. (Autor:in) / Harada, H. (Autor:in) / Inoue, N. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 144 - 147
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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