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Measurement of the infrared absorbance of nitrogen in CZ silicon
Measurement of the infrared absorbance of nitrogen in CZ silicon
Measurement of the infrared absorbance of nitrogen in CZ silicon
Matsumoto, T. (author) / Yamanaka, Y. (author) / Harada, H. (author) / Inoue, N. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 144 - 147
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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