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Structural and electrical properties of tantalum oxide films grown by photo-assisted pulsed laser deposition
Structural and electrical properties of tantalum oxide films grown by photo-assisted pulsed laser deposition
Structural and electrical properties of tantalum oxide films grown by photo-assisted pulsed laser deposition
Zhang, J. Y. (Autor:in) / Boyd, I. W. (Autor:in)
APPLIED SURFACE SCIENCE ; 186 ; 40-44
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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