Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Backside etching of UV-transparent materials at the interface to liquids
Backside etching of UV-transparent materials at the interface to liquids
Backside etching of UV-transparent materials at the interface to liquids
Bohme, R. (Autor:in) / Braun, A. (Autor:in) / Zimmer, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 186 ; 276-281
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Laser induced backside dry etching of transparent materials
British Library Online Contents | 2007
|Laser etching of transparent materials at a backside surface adsorbed layer
British Library Online Contents | 2006
|In situ reflectivity investigations of solid/liquid interface during laser backside etching
British Library Online Contents | 2006
|Backside etching of fused silica with Nd:YAG laser
British Library Online Contents | 2006
|Plasma Etching for Backside Wafer Thinning of SiC
British Library Online Contents | 2007
|