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Photo-lithography for 2D optical microstructures in porous silicon: application to nucleation of macropores
Photo-lithography for 2D optical microstructures in porous silicon: application to nucleation of macropores
Photo-lithography for 2D optical microstructures in porous silicon: application to nucleation of macropores
Setzu, S. (Autor:in) / Ferrand, P. (Autor:in) / Lerondel, G. (Autor:in) / Romestain, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 186 ; 588-593
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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