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Photo-lithography for 2D optical microstructures in porous silicon: application to nucleation of macropores
Photo-lithography for 2D optical microstructures in porous silicon: application to nucleation of macropores
Photo-lithography for 2D optical microstructures in porous silicon: application to nucleation of macropores
Setzu, S. (author) / Ferrand, P. (author) / Lerondel, G. (author) / Romestain, R. (author)
APPLIED SURFACE SCIENCE ; 186 ; 588-593
2002-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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