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Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography
Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography
Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography
Sirbuly, D. J. (Autor:in) / Lowman, G. M. (Autor:in) / Scott, B. (Autor:in) / Stucky, G. D. (Autor:in) / Buratto, S. K. (Autor:in)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 15 ; 149-152
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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