Phosphorus Ion Implantation into 4H-SiC (0001) and (11&unknown;20)

Negoro, Y. / Miyamoto, N. / Kimoto, T. et al. | British Library Online Contents | 2002

Electrical Activation of B^+-Ions Implanted into 4H-SiC

Tsirimpis, T. / Krieger, M. / Weber, H.B. et al. | British Library Online Contents | 2010

Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11&unknown;20), (1&unknown;100), and (0001) Oriented 6H-SiC

Eryu, O. / Matsuo, D. / Abe, K. et al. | British Library Online Contents | 2002

Annealing of Implanted Layers in (1&unknown;100) and (11&unknown;20) Oriented SiC

Satoh, M. | British Library Online Contents | 2002

Relationship between Donor Activation and Defect Annealing in 6H-SiC Hot-Implanted with Phosphorus Ions

Ohshima, T. / Uedono, A. / Itoh, H. et al. | British Library Online Contents | 2000