Electrical Activation of Implanted Phosphorus Ions in (0001)/(11&unknown;20)-Oriented 4H-SiC: Fid-Bau Portal

Electrical Activation of Implanted Phosphorus Ions in (0001)/(11&unknown;20)-Oriented 4H-SiC

Schmid, F. / Laube, M. / Pensl, G. / Wagner, G. / Maier, M.

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Electrical Activation of Implanted Phosphorus Ions in (0001)/(11&unknown;20)-Oriented 4H-SiC

Schmid, F. / Laube, M. / Pensl, G. / Wagner, G. / Maier, M.

Electrical Activation of Implanted Phosphorus Ions in (0001)/(11&unknown;20)-Oriented 4H-SiC

Schmid, F. / Laube, M. / Pensl, G. / Wagner, G. / Maier, M.

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Check availability in my library

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Document information

Title:

Electrical Activation of Implanted Phosphorus Ions in (0001)/(11&unknown;20)-Oriented 4H-SiC

Contributors:

Schmid, F. (author) / Laube, M. (author) / Pensl, G. (author) / Wagner, G. (author) / Maier, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 787-790

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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