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High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
Takeyama, M. B. (Autor:in) / Itoi, T. (Autor:in) / Aoyagi, E. (Autor:in) / Noya, A. (Autor:in)
APPLIED SURFACE SCIENCE ; 190 ; 450-454
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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