A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
Takeyama, M. B. (author) / Itoi, T. (author) / Aoyagi, E. (author) / Noya, A. (author)
APPLIED SURFACE SCIENCE ; 190 ; 450-454
2002-01-01
5 pages
Article (Journal)
English
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Diffusion barrier properties of nano-crystalline TiZrN films in Cu/Si contact systems
| British Library Online Contents | 2003
Diffusion barriers on titanium-based ohmic contact structures on SiC
| British Library Conference Proceedings | 1998
Self-Diffusion of Iron in Nano-Crystalline Iron Nitride
| British Library Online Contents | 2005
Rf-sputtering deposition of nano-crystalline zirconia thin films with high transparency
| British Library Online Contents | 2013
Ternary amorphous metallic thin films as diffusion barriers for Cu metallization
| British Library Online Contents | 1996