Reactive sputter deposition and characterization of tantalum nitride thin films

Radhakrishnan, K. / Geok Ing, N. / Gopalakrishnan, R. | British Library Online Contents | 1999

Amorphous molybdenum nitride thin films prepared by reactive sputter deposition

Wang, Y. / Lin, R. Y. | British Library Online Contents | 2004

Reactive Sputter Deposition of WC~x Films for Replacing Hexavalent Chromium

Park, Y. / Kang, S. / Kim, D. et al. | British Library Online Contents | 2005

Room temperature surface passivation of silicon for screen printed c-Si solar cells by HiTUS reactive sputter deposition

Kaminski, P. M. / Bass, K. / Claudio, G. et al. | British Library Online Contents | 2014

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H. / Morton, S. A. / Charnock, J. M. et al. | British Library Online Contents | 2000