Reactive sputter deposition and characterization of tantalum nitride thin films

Radhakrishnan, K. / Geok Ing, N. / Gopalakrishnan, R. | British Library Online Contents | 1999

Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films

Shen, Y. G. | British Library Online Contents | 2003

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H. / Morton, S. A. / Charnock, J. M. et al. | British Library Online Contents | 2000

Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film

Sakon, K. / Hirokawa, Y. / Masubuchi, Y. et al. | British Library Online Contents | 2010

Electrical resistivity of RuO~x thin films prepared by ion beam sputter deposition

Kezuka, H. / Egerton, R. / Masui, M. et al. | British Library Online Contents | 1993