Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Study on Deposition Rate of AlN Thin Films Using Reactive Magnetron Sputtering
Study on Deposition Rate of AlN Thin Films Using Reactive Magnetron Sputtering
Study on Deposition Rate of AlN Thin Films Using Reactive Magnetron Sputtering
Xiaohong, X. (Autor:in) / Haishun, W. (Autor:in) / Fuqiang, Z. (Autor:in)
RARE METAL MATERIALS AND ENGINEERING ; 31 ; 209-212
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
669
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
In situ deposition of PbTiO3 thin films by direct current reactive magnetron sputtering
| British Library Online Contents | 2016
Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering
| British Library Online Contents | 2009
AlNxOy thin films deposited by DC reactive magnetron sputtering
| British Library Online Contents | 2010
Reactive DC Magnetron Sputtering of Vanadium Oxide Thin Films
| British Library Online Contents | 2008
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
| British Library Online Contents | 1998